JPH0528780Y2 - - Google Patents
Info
- Publication number
- JPH0528780Y2 JPH0528780Y2 JP582185U JP582185U JPH0528780Y2 JP H0528780 Y2 JPH0528780 Y2 JP H0528780Y2 JP 582185 U JP582185 U JP 582185U JP 582185 U JP582185 U JP 582185U JP H0528780 Y2 JPH0528780 Y2 JP H0528780Y2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- thickness
- electrode
- substrate
- ohmic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 7
- 239000000758 substrate Substances 0.000 description 9
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 6
- 229910015363 Au—Sn Inorganic materials 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 238000005275 alloying Methods 0.000 description 3
- 229910015365 Au—Si Inorganic materials 0.000 description 2
- 238000003776 cleavage reaction Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000007017 scission Effects 0.000 description 2
- 229910017401 Au—Ge Inorganic materials 0.000 description 1
- 229910005745 Ge—Cr Inorganic materials 0.000 description 1
- 229910019192 Sn—Cr Inorganic materials 0.000 description 1
- MDPILPRLPQYEEN-UHFFFAOYSA-N aluminium arsenide Chemical compound [As]#[Al] MDPILPRLPQYEEN-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP582185U JPH0528780Y2 (en]) | 1985-01-19 | 1985-01-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP582185U JPH0528780Y2 (en]) | 1985-01-19 | 1985-01-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61123548U JPS61123548U (en]) | 1986-08-04 |
| JPH0528780Y2 true JPH0528780Y2 (en]) | 1993-07-23 |
Family
ID=30482686
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP582185U Expired - Lifetime JPH0528780Y2 (en]) | 1985-01-19 | 1985-01-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0528780Y2 (en]) |
-
1985
- 1985-01-19 JP JP582185U patent/JPH0528780Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61123548U (en]) | 1986-08-04 |
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